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KP390 Mirco Module Vacuum Gauge
KP390 Mirco Module Vacuum Gauge

KP390 Mirco Module Vacuum Gauge

Piezo, MEMS Pirani Vacuum Gauge

Measurement Range
1.0E-4 to 1500Torr

Display unit
Torr, Pa

Application Sensor
KP350 NTA Pirani Gauge

Optional : Interface
RS485 ASCⅡ, RS485 ModBus RTU
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KP390 Mirco Module Vacuum Gauge has a compact design, and only the sensor can be separated, allowing measurement over a wide range.

Additionally, the accuracy is excellent by using Mems and Piezo Sensor.

It is a vacuum gauge designed to provide reliability and precise performance and can control various vacuum systems and pressures by utilizing output.

 

 

 

Key Feature  

 

-KP390 is a combination gauge using MEMS Pirani Sensor & Piezo Resistive Silicon

 Sensor to provide precise values with good precision and fast response speed.

 

-Only Sensors can be replaced separately, reducing maintenance costs.

 

-Compact design and accuracy. stability. reliability. reproducibility. durability will help

 with company quality and productivity.

 

-Made of all-metal, there is no problem with RF interference.

 

 

 

Need help?

Contact an Application specialist by sending an email to KVC or Call +82-32-234-3030


※ ​How to choose the Best Product

 

Product Specification 

- Controller Specification

 

 Measuring Range for Air and N2

 1.0E-4 ~ 1500 Torr

 Operating Temperature

 0 ~ 60 ℃

 Storage Temperature

 - 40 ~ 70 ℃

 Case Material

 Aluminum

 Compliance 

 N/A

 Display 

 4 Digit LED, Status LED

 Set Point Relays

 2 Point SPST ( 1A / 30VDC, 0.5A / 125VAC )

 Analog Output

 Log scale ( 0 ~ 7.18 Vdc ) / Lin Scale ( 0 ~ 10 Vdc ) 

 Digital Interface

 485 ASCII / 485 MODBUS

 Power Required

 DC 24V / 200 mA 

 Weight

 430g ( With sensor ) 

 Mounting 

 Field Flange Mounting

 


- Sensor Specification

 

 Sensor Type

 Wide Range Gauge ( KVC350 - XX )

 Sensor Materials

 Piezo Resistive silicon Sensor with sus housing

 Gold Plated tungsten or Platinum  

 Internal Volume

 5 cm3 

 Gauge Bakeout Temperature

 150 ℃ Maximum, NON - operating

 Case Materials

 304 Stainless steel, borosilicate glass, Kovar

 ​

 

※ Do not use in explosive atmospheres or flammable gases or vapors.

※ Do not use it to measure the pressure of explosive gas, combustible gas, or mixed gas.
    SENSOR FILAMENT generally has a operating temperature of 110℃.

  

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Piezo, MEMS Pirani Vacuum Gauge Sensor Measurement Range 1.0E-04 to 1500Torr Application Sensor NTA Pirani Vacuum Gauge Application Model KP390 - KVC350 Sensor