Vacuum Products

KVC as a vacuum measuring instrument specialized company aiming to become a leading company in 21stcentury control and measurement industry

KVC500 ATM SHIM Vacuum Gauge Sensor

KVC500 ATM SHIM Vacuum Gauge Sensor

Piezo, Pirani Vacuum Gauge Sensor

Measurement Range
1.0E-3 to 1500Torr

Application Model
KVC500ATM SHIM Vacuum Gauge
Specitification downloadDownload
Dimension downloadDownload
Manual

( Gold Plated Tungsten, Piezo ) 

KVC500 ATM SHIM Vacuum Gauge Sensor is a product that combines Piezo Sensor and Pirani Gauge. It accurately measures vacuum pressure and is used in various vacuum processes.

Ensures highest level of accuracy and gauge-to-gauge reproducibility. 

Individually calibrated, eliminating the need for controller adjustments.

 

Key Feature


-The KVC500 ATM Shim Vacuum Sensor can be measured in a wide range from 1.0E-03 to 1500 Torr using 

 the Piezo type silicon pressure Sensor.

 

-The KVC500 ATM Shim Vacuum Sensor is applied with KVC patented technology and

 has excellent accuracy, stability, durability and reliability.

 

 

 

 

Need help?

Contact an Application Specialist by an sending an email to KVC or Call 032-234-3030

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Product Specification

- Sensor Specification

 

 Sensor Type

 ATM SHIM Gauge ( KVC500 - XX )

 Sensor Materials

 Piezo Resistive silicon Sensor with sus housing

 Gold Plated tungsten or Platinum

 Internal Volume

 30 cm

 Gauge Bakeout Temperature

 150 ℃ Maximum, NON - operating

 Case Materials

 304 Stainless steel, borosilicate glass, Kovar

 

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※ Do not use in explosive atmospheres or flammable gases or vapors.

 Do not use it to measure the pressure of explosive gas, combustible gas, or mixed gas.
    SENSOR FILAMENT generally has a operating temperature of 110℃.

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